Twice Flipped - Avoiding Milling Curtains in FIB Prepared TEM Specimens of Nano-Electronics Devices
نویسندگان
چکیده
منابع مشابه
Heating of TEM specimens during ion milling.
Sample heating during preparation of electron-thin specimens for observation in transmission electron microscopy (TEM) can produce artefacts which invalidate observations. This is particularly true of two-phase materials such as metal matrix composites, for which sample cooling with liquid nitrogen cannot be used to preserve the substructure during milling. A series of experiments is conducted ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2010
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927610059957